12

Residual stress and thermal stress observation in thin copper films

Year:
2004
Language:
english
File:
PDF, 353 KB
english, 2004
26

GaN films deposited by planar magnetron sputtering

Year:
2002
Language:
english
File:
PDF, 148 KB
english, 2002
30

Residual stress in TiN film deposited by arc ion plating

Year:
1999
Language:
english
File:
PDF, 351 KB
english, 1999
40

Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr

Year:
2002
Language:
english
File:
PDF, 149 KB
english, 2002